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Buried insulator formation by nitrogen implantation at elevated temperatures

✍ Scribed by N. Hatzopoulos; U. Bussmann; A.K. Robinson; P.L.F. Hemment

Book ID: 113282476
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 489 KB
Volume: 55
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(91)96268-p

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