The characteristics of organic–inorganic
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S.-J. Cho; I.-S. Bae; Y.S. Park; B. Hong; W. Park; S.C. Park; J.-H. Boo
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Article
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2008
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Elsevier Science
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English
⚖ 594 KB
Organic-Inorganic hybrid-polymer thin films were deposited on silicon(100) substrates by plasma enhanced chemical vapor deposition (PECVD) method using monomer precursors of the organic-inorganic hybrid polymers. Ethylcyclohexane (ECH) and tetraethoxysilane (TEOS) were utilized as organic and inorga