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Broadband antireflection coatings deposited by magnetron sputtering

✍ Scribed by Mingli Wang; Hui Gong; Zhengxiu Fan


Book ID
105640872
Publisher
Springer
Year
1997
Tongue
English
Weight
223 KB
Volume
42
Category
Article
ISSN
1001-6538

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The paper presents the results obtained on the deposition and characterization of niobium carbide thin films obtained by reactive magnetron sputtering method in a reactive atmosphere composed by Ar and CH 4 . The coatings were deposited on Si substrates, at 100 Β°C, 400 Β°C and 750 Β°C, at two differen