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Boron surfactant enhanced growth of thin Si films on CaF2/Si

✍ Scribed by Wang, C. R.; Muller, B. H.; Bugiel, E.; Wietler, T.; Bierkandt, M.; Hofmann, K. R.; Zaumseil, P.

Book ID: 111865286
Publisher: AVS (American Vacuum Society)
Year: 2004
Tongue: English
Weight: 532 KB
Volume: 22
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.1789215

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