Boron Carbonitride Thin Films by PACVD of Single-Source Precursors

✍ Scribed by Dirk Hegemann; Prof. Ralf Riedel; Dr. Wolfgang Dreßler; Dr. Christian Oehr; Dr. Bernd Schindler; Prof. Herwig Brunner

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 556 KB
• Volume: 3
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.19970030503