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Bonding structure of CNx films synthesized by nitrogen implantation into diamond films

โœ Scribed by Peijiang Cao; W.T Zheng; Zhigang Jiang; Zengsun Jin; Zongxin Mu; Chuang Dong

Book ID
114192719
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
105 KB
Volume
72
Category
Article
ISSN
0254-0584

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The influence of N 2 Plasma Immersion Ion Implantation (PIII) on undoped nanocrystalline diamond (NCD) films grown on silicon substrate by CVD process using a hot filament reactor was systematically studied. Before and after the implantation, NCD films were investigated using scanning electron micro