Bonding of glass nanofluidic chips at room temperature by a one-step surface activation using an O2/CF4 plasma treatment

✍ Scribed by Xu, Yan; Wang, Chenxi; Li, Lixiao; Matsumoto, Nobuhiro; Jang, Kihoon; Dong, Yiyang; Mawatari, Kazuma; Suga, Tadatomo; Kitamori, Takehiko

• Book ID: 120515296
• Publisher: Royal Society of Chemistry
• Year: 2013
• Tongue: English
• Weight: 947 KB
• Volume: 13
• Category: Article
• ISSN: 1473-0197
• DOI: 10.1039/c3lc41345d