✦ LIBER ✦
Low-temperature direct bonding of glass nanofluidic chips using a two-step plasma surface activation process
✍ Scribed by Yan Xu; Chenxi Wang; Yiyang Dong; Lixiao Li; Kihoon Jang; Kazuma Mawatari; Tadatomo Suga; Takehiko Kitamori
- Publisher
- Springer
- Year
- 2011
- Tongue
- English
- Weight
- 571 KB
- Volume
- 402
- Category
- Article
- ISSN
- 1618-2650
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