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Biological functionalization and patterning of porous silicon prepared by Pt-assisted chemical etching

✍ Scribed by Hong-Fang Li; Huan-Mei Han; Ya-Guang Wu; Shou-Jun Xiao


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
655 KB
Volume
256
Category
Article
ISSN
0169-4332

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Structural and spectroscopic characteriz
✍ Tilghman L Rittenhouse; Paul W Bohn; Ilesanmi Adesida πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 878 KB

A novel electroless method of producing porous silicon carbide (PSiC) is presented. Unlike anodic methods of producing PSiC, the electroless process does not require electrical contact during etching. Rather, platinum metal deposited on the wafer before etching serves as a catalyst for the reduction