Structural and spectroscopic characteriz
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Tilghman L Rittenhouse; Paul W Bohn; Ilesanmi Adesida
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Article
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2003
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Elsevier Science
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English
β 878 KB
A novel electroless method of producing porous silicon carbide (PSiC) is presented. Unlike anodic methods of producing PSiC, the electroless process does not require electrical contact during etching. Rather, platinum metal deposited on the wafer before etching serves as a catalyst for the reduction