Bias sputtering: its techniques and applications : James M. Seeman, Vacuum17, No. 3, p. 129.

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 101 KB
• Volume: 6
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(67)90158-8