1141. Bias sputtering: its techniques and applications: J M Seeman, Vacuum, 17 (3), March 1967, 129–137

• Publisher: Elsevier Science
• Year: 1967
• Tongue: English
• Weight: 144 KB
• Volume: 17
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(67)92408-6