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Bias-dependent STM investigations of trimethylgallium adsorption on Si(001) at elevated temperatures

✍ Scribed by H. Nörenberg; D.R. Bowler; G.A.D. Briggs


Book ID
108418570
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
403 KB
Volume
123-124
Category
Article
ISSN
0169-4332

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Optical second-harmonic generation has been used to determine the sticking probability for dissociative adsorption of HZ and D2 on Si( 100)2x 1 as a function of surface temperature. The initial sticking coefficient increases from 10e8 at 550 K to 10e5 at 1OOOK. It shows an activated behaviour as a f