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Beam optics in secondary ion mass spectrometry

โœ Scribed by Helmut Liebl


Publisher
Elsevier Science
Year
1981
Weight
722 KB
Volume
187
Category
Article
ISSN
0167-5087

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A new focused ion beam optical system that uses a liquid metal ion source was designed for a new secondary ion time-of-flight mass spectrometry instrument. This optical system consists mainly of two electrostatic lenses. The axial performance of the system was calculated to decide the design values