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Beam intensity fluctuation characteristics of the metal vapor vacuum arc ion source

✍ Scribed by I.G. Brown; P. Spädtke; H. Emig; D.M. Rück; B.H. Wolf

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 782 KB
Volume: 295
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(90)90416-4

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