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Band gap enhancement and electrical properties of La[sub 2]O[sub 3] films doped with Y[sub 2]O[sub 3] as high-k gate insulators

✍ Scribed by Y. Zhao; K. Kita; K. Kyuno; A. Toriumi

Book ID: 125841354
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 542 KB
Volume: 94
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3075954

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