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Backscattering analysis of thin SiO2 films on Si using 16O(α,α)16O 3.045 MeV resonance

✍ Scribed by Michio Watamori; Kenjiro Oura; Takashi Hirao; Kaoru Sasabe


Book ID
113287207
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
456 KB
Volume
118
Category
Article
ISSN
0168-583X

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