Background subtraction: I. General behaviour of Tougaard-style backgrounds in AES and XPS
β Scribed by M.P. Seah
- Book ID
- 117219066
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 382 KB
- Volume
- 420
- Category
- Article
- ISSN
- 0039-6028
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## Abstract The inelastic background subtraction algorithm that was proposed by Tougaard for xβray photoelectron spectroscopy is applied to Auger electron spectra of Si, SiO~2~ and Si~3~N~4~. The influence of the different parameters, the cascade fitting and the use of calculated Ξ»(__E__)__K__(__E_
A recently developed procedure to eliminate the inelastic tail below the characteristic peaks in AES/XPS spectra is analysed theoretically and tested using experimental Auger spectra from four homogeneous solids (Au, Pt, Ta and Ni). To this end, the parameter in this procedure accounting for the det