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Background subtraction: I. General behaviour of Tougaard-style backgrounds in AES and XPS

✍ Scribed by M.P. Seah


Book ID
117219066
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
382 KB
Volume
420
Category
Article
ISSN
0039-6028

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## Abstract The inelastic background subtraction algorithm that was proposed by Tougaard for x‐ray photoelectron spectroscopy is applied to Auger electron spectra of Si, SiO~2~ and Si~3~N~4~. The influence of the different parameters, the cascade fitting and the use of calculated Ξ»(__E__)__K__(__E_

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