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AZ-1518 Photoresist analysis with synchrotron radiation using high-resolution time-of-flight mass spectrometry

✍ Scribed by L.A.V. Mendes; R.R. Pinho; L.F. Ávila; C.R.A. Lima; M.L.M. Rocco

Book ID: 108246361
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 687 KB
Volume: 92
Category: Article
ISSN: 0141-3910
DOI: 10.1016/j.polymdegradstab.2007.03.011

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