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Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

✍ Scribed by L. A. Rocha; R. A. Dias; E. Cretu; L. Mol; R. F. Wolffenbuttel


Book ID
106186086
Publisher
Springer-Verlag
Year
2011
Tongue
English
Weight
614 KB
Volume
17
Category
Article
ISSN
0946-7076

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