Auger line shape analysis of hydrogenate
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N.A. Burnham; A.B. Swartzlander; A.J. Nelson; L.L. Kazmerski
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Article
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1987
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Elsevier Science
β 289 KB
Auger line shape analysis of the Si L23VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L23VV peak was deconvoluted into its L23