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Auger electron and X-ray spectroscopic analysis of AuGe contacts to GaAs

✍ Scribed by Procop, M. ;Raidt, H. ;Sandow, B.

Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
690 KB
Volume
99
Category
Article
ISSN
0031-8965

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Classified abstracts 33983407 permeates helium contained in analysed probes. It is found that the coefficient of trapping He ions in the pump is 0.76 f 30% and it does not deoend on discharge voltage in the range 0.9 to 3.3 kV. The life of the indicator is lo4 &alysesat a sensitivity of 5 x 10-r" A/