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Auger depth profiling of MNOS structures by ion sputtering

✍ Scribed by Johannessen, J.S.; Helms, C.R.; Spicer, W.E.; Strausser, Y.E.

Book ID
114592396
Publisher
IEEE
Year
1977
Tongue
English
Weight
512 KB
Volume
24
Category
Article
ISSN
0018-9383

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πŸ“œ SIMILAR VOLUMES

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## Abstract The depth resolution in Auger in‐depth profiles of TiN thin films on smooth Si substrates is determined by the evolution of a sputter‐induced surface roughness. It is shown that this effect depends critically on the ion angle of incidence. Therefore, the depth resolution can be improved