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Au-induced crystallization of hydrogenated amorphous Si1−xGex (0.2 ≤ x ≤ 1) thin films with chemical source at low temperature

✍ Scribed by Shanglong Peng; Xiaoyan Shen; Zeguo Tang; Deyan He

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Au-induced crystallization of hydrogenated amorphous Si1−xGex (0.2&#xa0;≤&#xa0;x&#xa0;≤&#xa0;1) thin films with chemical source at low temperature