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Atomic structure of amorphous Si1−xCx films prepared by r.f. sputtering

✍ Scribed by Yoshihumi Suzaki; Shozo Inoue; Isao Hasegawa; Kumayasu Yoshii; Hideaki Kawabe


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
485 KB
Volume
173
Category
Article
ISSN
0040-6090

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