Properties of hydrogenated amorphous SiN films prepared by r.f. magnetron sputtering with emphasis on the non-stoichiometric region

✍ Scribed by Ratnabali Banerjee; A.K. Bandyopadhyay; J.K. Rath; A.K. Batabyal; A.K. Barua

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 550 KB
• Volume: 192
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(90)90074-n