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Atomic rearrangement of sputtered amorphous carbon nitride thin films during growth

✍ Scribed by Durand-Drouhin, O.; Benlahsen, M.; Clin, M.; Zellama, K.

Book ID
123396906
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
226 KB
Volume
13
Category
Article
ISSN
0925-9635

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