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Atomic layer epitaxy - a valuable tool for nanotechnology?

✍ Scribed by Ritala, Mikko; Leskelä, Markku

Book ID: 120251000
Publisher: Institute of Physics
Year: 1999
Tongue: English
Weight: 198 KB
Volume: 10
Category: Article
ISSN: 0957-4484
DOI: 10.1088/0957-4484/10/1/005

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