Atomic Layer Deposition to Fine-Tune the Surface Properties and Diameters of Fabricated Nanopores

✍ Scribed by Chen, Peng; Mitsui, Toshiyuki; Farmer, Damon B.; Golovchenko, Jene; Gordon, Roy G.; Branton, Daniel

• Book ID: 120075163
• Publisher: American Chemical Society
• Year: 2004
• Tongue: English
• Weight: 91 KB
• Volume: 4
• Category: Article
• ISSN: 1530-6984
• DOI: 10.1021/nl0494001