Atomic layer deposition of zinc indium sulfide films: Mechanistic studies and evidence of surface exchange reactions and diffusion processes

✍ Scribed by Genevée, Pascal; Donsanti, Frédérique; Schneider, Nathanaelle; Lincot, Daniel

• Book ID: 121786328
• Publisher: AVS (American Vacuum Society)
• Year: 2013
• Tongue: English
• Weight: 796 KB
• Volume: 31
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.4768919