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Atomic layer deposition of Al_2O_3 and TiO_2 multilayers for applications as bandpass filters and antireflection coatings

✍ Scribed by Szeghalmi, Adriana ;Helgert, Michael ;Brunner, Robert ;Heyroth, Frank ;Gösele, Ulrich ;Knez, Mato


Book ID
115354300
Publisher
The Optical Society
Year
2009
Tongue
English
Weight
565 KB
Volume
48
Category
Article
ISSN
1559-128X

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