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Atomic layer deposition growth of zirconium doped In2O3 films

✍ Scribed by Timo Asikainen; Mikko Ritala; Markku Leskelä

Book ID: 108388715
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 73 KB
Volume: 440
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(03)00822-8

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