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Atomic force microscopy study on the surface structure of oxidized porous silicon

✍ Scribed by T.F. Young; I.W. Huang; Y.L. Yang; W.C. Kuo; I.M. Jiang; T.C. Chang; C.Y. Chang


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
455 KB
Volume
102
Category
Article
ISSN
0169-4332

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The surface properties of patterned surfaces made by a combination of photolithography and oxygen plasma treatment of polystyrene (PS) were investigated. PS and plasma-treated PS (PSox) were first characterized using X-ray photoelectron spectroscopy and the study of wetting dynamics (Wilhelmy plate