Atomic force microscopy study of surface roughening of sputter-deposited TiN thin films

✍ Scribed by Liu, Z.-J.; Jiang, N.; Shen, Y. G.; Mai, Y.-W.

• Book ID: 120342262
• Publisher: American Institute of Physics
• Year: 2002
• Tongue: English
• Weight: 455 KB
• Volume: 92
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1504497