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Atomic force microscopic investigation of PZT thin films by mod technology

โœ Scribed by Lu, W.; Zhu, W.; Yao, X.


Book ID
126592742
Publisher
Taylor and Francis Group
Year
1997
Tongue
English
Weight
608 KB
Volume
196
Category
Article
ISSN
0015-0193

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In this study, the radio frequency (RF) magnetron sputtering process is used to generate a PZT ferroelectric thin film on a silicon substrate. The surface characteristics of this lead zirconate titanate film Pb(Zr Ti )O is then investigated by means of an atomic force microscopy (AFM) method. The r