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Atomic diffusion at solid/liquid interface of silicon: Transition layer and defect formation

✍ Scribed by Motooka, Teruaki; Nishihira, Ken; Oshima, Ryuichiro; Nishizawa, Hirosato; Hori, Fuminobu

Book ID
111985487
Publisher
The American Physical Society
Year
2002
Tongue
English
Weight
910 KB
Volume
65
Category
Article
ISSN
1098-0121

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