Fabrications of narrow electrode grooves for front electrodes on single crystalline silicon solar cells were examined using surface discharges, in which the electrode grooves were formed by etching a silicon nitride (SiN) film on substrates. The surface discharge could effectively etch the SiN film
✦ LIBER ✦
Atmospheric-Pressure Plasmas for Solar Cell Manufacturing
✍ Scribed by I. Dani; G. Mäder; P. Grabau; B. Dresler; D. Linaschke; E. Lopez; S. Kaskel; E Beyer
- Publisher
- John Wiley and Sons
- Year
- 2009
- Tongue
- English
- Weight
- 275 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0005-8025
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