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Atmospheric pressure chemical vapor deposition of titanium dioxide films from TiCl4

โœ Scribed by B. Arvan; A. Khakifirooz; R. Tarighat; S. Mohajerzadeh; A. Goodarzi; E.Asl. Soleimani; E. Arzi


Book ID
104061950
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
304 KB
Volume
109
Category
Article
ISSN
0921-5107

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