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Atmosphere influence on in-situ ion beam analysis of thin film growth

✍ Scribed by Yuping Lin; Alan R. Krauss; Robert P.H. Chang; Orlando H. Auciello; Dieter M. Gruen; J.Albert Schultz


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
581 KB
Volume
253
Category
Article
ISSN
0040-6090

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