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Asymptotic analysis of a non-linear model for substitutional diffusion in semiconductors

✍ Scribed by J. R. King; M. G. Meere; T. G. Rogers


Publisher
Springer
Year
1992
Tongue
English
Weight
767 KB
Volume
43
Category
Article
ISSN
0044-2275

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A procedure is described for estimating various parameters governing the diffusion of impurities in semiconductors; these parameters are required for a number of explicit numerical models of non-linear diffusion in III-V crystals. The method is based on an analytical solution of the continuum equiva