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Asymptotic analysis of a model for substitutional-interstitial diffusion

โœ Scribed by M. G. Meere; J. R. King; T. G. Rogers


Publisher
Springer
Year
1994
Tongue
English
Weight
763 KB
Volume
45
Category
Article
ISSN
0044-2275

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A discrete model of substitutional-inter
โœ M. T. Hearne; T. G. Rogers; B. Tuck ๐Ÿ“‚ Article ๐Ÿ“… 1988 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 698 KB

A discrete model is developed to describe the diffusion of dopanthmpurity in a single semiconductor crystal during Czochralski growth. The basic diffusion mechanism is assumed to be substitutional-interstitial interchange for the impurity, together with self-diffusion of the host atoms. In particula