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Asymmetric surface roughness measurements and meniscus modeling of polysilicon surface micromachined flaps

✍ Scribed by Xiaojie Xue; Leslie M. Phinney; Andreas A. Polycarpou


Book ID
106185295
Publisher
Springer-Verlag
Year
2007
Tongue
English
Weight
463 KB
Volume
14
Category
Article
ISSN
0946-7076

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