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As redistribution during Ti silicide formation

✍ Scribed by Ning Yu; Zuyao Zhou; Wei Zhou; Shichang Tsou; Dezhang Zhu

Book ID: 114168101
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 257 KB
Volume: 19-20
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(87)80084-8

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