Arsenic ion beam induced mixing in Ta/Pd thin films on silicon

✍ Scribed by N Bibić; ZH Jafri; M Milosavljević; D Peruško

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 849 KB
• Volume: 46
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(95)00067-4