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Array of thick film sensors for atmospheric pollutant monitoring

✍ Scribed by Maria Christina Carotta; Giuliano Martinelli; Luigi Crema; Massimiliano Gallana; Marco Merli; Giovanna Ghiotti; Enrico Traversa

Book ID
108469217
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
861 KB
Volume
68
Category
Article
ISSN
0925-4005

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Advantages of PZT thick film for MEMS se
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For all MEMS devices a high coupling between the mechanical and electrical domain is desired. Figures of merit describing the coupling are important for comparing different piezoelectric materials. The existing figures of merit are discussed and a new figure of merit is introduced for a fair compari