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Ar+‐ion milling characteristics of III‐V nitrides

✍ Scribed by Pearton, S. J.; Abernathy, C. R.; Ren, F.; Lothian, J. R.

Book ID: 118056597
Publisher: American Institute of Physics
Year: 1994
Tongue: English
Weight: 883 KB
Volume: 76
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.357849

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