ArF excimer laser-enhanced photochemical vapor deposition of epitaxial Si from Si2H6: A simple growth kinetic model

✍ Scribed by B. Fowler; S. Lian; S. Krishnan; L. Jung; C. Li; D. Samara; I. Manna; S. Banerjee

• Book ID: 112819798
• Publisher: Springer US
• Year: 1992
• Tongue: English
• Weight: 704 KB
• Volume: 21
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/bf02665517