𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Aqueous etch-resistant


Book ID
122028913
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
127 KB
Volume
96
Category
Article
ISSN
0026-0576

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## Abstract This paper describes two types of cross‐linked positive‐working electron resists. The first is based upon phenol‐formaldehyde resins crosslinked to poly‐(methyl methacrylate) by phenolic ester groups. The second type is based upon polystyrene, crosslinked by carboxylic acid anhydride gr