Synchrotron x-ray microbeams with less than a few lm spatial resolution have been applied to x-ray spectroscopic and di β raction studies. Among various x-ray spectrometric applications, the relatively new techniques of nearsurface x-ray Γuorescence analysis and the micro x-ray absorption Γne structu
Applications of synchrotron X-rays in microelectronics industry research
β Scribed by Jean L. Jordan-Sweet; Christophe Detavernier; Christian Lavoie; Patricia M. Mooney; Michael F. Toney
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 329 KB
- Volume
- 241
- Category
- Article
- ISSN
- 0168-583X
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