Applications of polyimide membranes to MEMS technology
โ Scribed by C. Shearwood; M.A. Harradine; T.S. Birch; J.C. Stevens
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 784 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.
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