Application of the polysilicon edge sealed LOCOS process in scaled VLSI circuit fabrication

✍ Scribed by D. Simeonov; T. Balabanska; E. Goranova; M. Zvetkova; T. Dimitrova; Z. Naidenova

• Book ID: 108361512
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 856 KB
• Volume: 19
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(88)80133-2